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Growth and characterization of crystalline rare-earth based thin oxide films for the application as gate dielectric in nanotechnology /
Schäfer, Anna Barbara
2015
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“
...
field
effect
transistor
...
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Growth and characterization of crystalline rare-earth based thin oxide films for the application as gate dielectric in nanotechnology [E-Book] /
Schäfer, Anna Barbara
2015
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“
...
field
effect
transistor
...
”
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3
Book
High-k gate dielectrics for CMOS technology /
He, Gang
2012
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field
effect
transistor
...
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Available as
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2
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1
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Book
3
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ZB
3
Name
Schäfer, Anna Barbara
2
He, Gang
1
Subject
MOS device
field effect transistor
3
dielectric film
2
dielectric material
2
oxide
2
thin film
2
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MOS transistor
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rare earth material
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semiconductor device
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Classification
FFPE - Thin film electronic properties, semiconductor interfaces
2
FGN - Nanotechnology
2
FJBC - Dielectric materials
2
FJK - Specific semiconductor materials
1
TBF - Semiconductor devices
1
Language
English
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