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NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies [E-Book] /
Table of Contents: ... Microscope -- STM Nanolithography and Characterization of Passivated Silicon and Gallium Arsenide -- Sub-20 nm Lithographic Patterning with the STM -- Lithography of YBa2Cu3O7 Superconducting Thin Films with a Scanning Tunneling Microscope -- Author Index....

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