Table of Contents: “... Nitride Process Development -- *Materials Aspects and Implementation of Silicides for ULSI -- Ion Beam Synthesis of Buried Iron Disilicide -- Diffusion in Cobalt Suicide During Silicide Formation -- Formation of Germanides by Rapid Thermal Annealing...”

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Table of Contents: “... -- The Oxidation of Suicides on Silicon -- Oxidation Kinetics of Si in Dry CO2 -- A Novel Silicon Oxidation Method — HF Enhanced Oxidation -- Thermal Oxidation of Silicon in an Afterglow Gas -- Deposition of SiO2 Thin Films by Remote Plasma Enhanced Chemical Vapor...”

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