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diffusion
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diffusion
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1
Book
Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
Hoppe, Bernhard.
1998
Subject (ZB):
“
...
ion
implantation
...
”
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2
Book
Properties and growth of diamond.
Davies, G.
1994
Subject (ZB):
“
...
ion
implantation
...
”
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Select result number 3
3
Book
International symposium on process physics and modeling in semiconductor technology 0003: proceedings : Electrochemical Society spring meeting 1993 : Honolulu, HI, 19.05.93-21.05.9...
Srinivasan, G. R.
1993
Subject (ZB):
“
...
ion
implantation
...
”
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3
Material Type
Book
3
Type of Literature
Handbook, Textbook
1
Conference Publication
1
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ZB
3
Name
Davies, G.
1
Hoppe, Bernhard.
1
Srinivasan, G. R.
1
Subject
diffusion
ion implantation
3
growth
2
chemical vapor deposition
1
decay
1
defect
1
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diamond
1
dislocation
1
electric conductivity
1
epitaxy
1
etching
1
interface
1
laser
1
luminescence
1
microfabrication (for microelectronics only)
1
microlithography
1
modeling
1
nitrogen
1
plasma processing
1
radiation damage
1
semiconductor
1
semiconductor device
1
surface
1
surface properties
1
technology
1
thin film
1
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Classification
FGC - Crystal growth, crystal technology
1
FGM - Microelectronic technology
1
FJH - Semiconductor physics
1
FJK - Specific semiconductor materials
1
FNX - Carbon, carbon materials
1
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