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1
Book
Magnetron-gesputterte superharte, amorphe Kohlenstoffschichten mit gradiertem Schichtaufbau /
Stüber, Michael.
1997
Subject (ZB):
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sputter
deposition
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Stüber, Michael.
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amorphous film
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carbon
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electric conductivity
materials characterization
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mechanical properties
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sputter deposition
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thermal conductivity
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FGK - Thin film technology, epitaxy
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FNX - Carbon, carbon materials
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