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1
Book
Silicon: chemical etching.
Grabmaier, J.
1982
“
...
FGCD
-
Crystal
growth
of
specific
substances
...
”
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Grabmaier, J.
1
Heimann, R. B.
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Subject
etching
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FGCD - Crystal growth of specific substances
1
FGKJ - Plasma processing, etching
1
FJKB - Elemental semiconductors
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