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film deposition
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catalysis
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Catalytic chemical vapor deposition : technology and applications of Cat CVD /
Matsumura, Hideki
2019
“
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FGK
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Dünnfilmtechnologie
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Epitaxie
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Gleason, Karen K.
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Matsumura, Hideki
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Schropp, Ruud E. I.
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Umemoto, Hironobu
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catalysis
catalyst support
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chemical vapor deposition
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crystal doping
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film
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film deposition
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polymer
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thin film
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FGKF - Chemical vapor deposition
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