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film deposition
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1
Book
Ion assisted surface treatments, techniques and processes : Proceedings of the conference : Coventry, 14.09.1982-16.09.1982.
1982
Subject (ZB):
“
...
sputter
deposition
...
”
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chemical vapor deposition
1
film deposition
ion implantation
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ion plating
1
sputter deposition
1
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FGGE - Ion beam surface modification
1
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