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Thin films - stresses and mechanical properties. 9 : symposium held November 26-30, 2001, Boston, Massachusetts, USA : [2001 MRS fall meeting] /

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Thin films - stresses and mechanical properties. 9 : symposium held November 26-30, 2001, Boston, Massachusetts, USA : [2001 MRS fall meeting] /

Ozkan, Cengiz S.
2002

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