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microelectronics
Brodie, Ivor.
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Brodie, Ivor.
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1
Book
The Physics of micro/nano-fabrication /
Brodie, Ivor.
1992
“
...
FGM
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Mikroelektronik
-
Technologie
...
”
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Brodie, Ivor.
Muray, Julius J.
1
Subject
ion beam processing
1
lithography
1
microelectronics
microfabrication (for microelectronics only)
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microtechnology
1
pattern formation
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Classification
FGM - Microelectronic technology
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