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1
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Atomic layer processing : semiconductor dry etching technology /
Lill, Thorsten
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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1
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1
Name
Lill, Thorsten
1
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Nanostructured material
1
etching
1
plasma physics
semiconductor
1
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FGKJ - Plasma processing, etching
1
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English
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