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plasma physics
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discharge
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1
Book
Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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IEK-4
1
ZB
1
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Lichtenberg, Allan J.
1
Lieberman, Michael E.
1
Subject
chemical vapor deposition
1
discharge
ion implantation
1
plasma etching
1
plasma physics
thin film technology
1
Classification
FGKJ - Plasma processing, etching
1
PGA - Plasma physics
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