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plasma physics
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semiconductor
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1
Book
Atomic layer processing : semiconductor dry etching technology /
Lill, Thorsten
“
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FGKJ
-
Plasma
processing
,
etching
...
”
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Material Type
Book
1
Location
ZB
1
Name
Lill, Thorsten
1
Subject
Nanostructured material
1
etching
1
plasma physics
semiconductor
Classification
FGKJ - Plasma processing, etching
1
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English
1
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