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Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
Hoppe, Bernhard.
1998
“
...
FGM
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Microelectronic
technology
...
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Hoppe, Bernhard.
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chemical vapor deposition
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diffusion
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epitaxy
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ion implantation
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microfabrication (for microelectronics only)
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microlithography
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