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1
Book
Großflächige Plasmaabscheidung von mikrokristallinem Silizium für mikromorphe Dünnschichtsolarmodule /
Kilper, Thilo
2009
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ZB
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Name
Kilper, Thilo
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Subject
plasma processing
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silicon
silicon solar cell
1
thin film
1
Classification
EISF - Thin film solar cells
1
FGK - Thin film technology, epitaxy
1
FGKJ - Plasma processing, etching
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Language
German
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