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1
Book
Reactive sputter deposition /
Depla, Diederik
2008
Subject (ZB):
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sputter
deposition
...
”
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2
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Untersuchung des reaktiven Sputterprozesses zur Herstellung von aluminiumdotierten Zinkoxid-Schichten für Silizium-Dünnschichtsolarzellen [E-Book] /
Hüpkes, Jürgen
2006
Subject (ZB):
“
...
sputter
deposition
...
”
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3
Book
Untersuchung des reaktiven Sputterprozesses zur Herstellung von aluminiumdotierten Zinkoxid-Schichten für Silizium-Dünnschichtsolarzellen /
Hüpkes, Jürgen
2006
Subject (ZB):
“
...
sputter
deposition
...
”
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2
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3
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ZB
3
Name
Hüpkes, Jürgen
2
Depla, Diederik
1
Subject
sputter deposition
3
sputtering
thin film
3
silicon solar cell
2
Classification
EISF - Thin film solar cells
2
FGK - Thin film technology, epitaxy
2
FGKC - Vacuum deposition, MBE
1
Language
German
2
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