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superconducting film
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evaporation
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Herstellung dünner YBa2Cu3O(7-delta) Schichten durch getaktete Elektronenstrahlverdampfung im ECR Plasma.
Hartmann, Martin.
1994
“
...
FGK
-
Thin
film
technology
,
epitaxy
...
”
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Hartmann, Martin.
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electron beam
1
evaporation
plasma
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superconducting film
thin film technology
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FGK - Thin film technology, epitaxy
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