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thin film technology
Lichtenberg, Allan J.
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thin film technology
Lichtenberg, Allan J.
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1
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Principles of plasma discharges and materials processing /
Lichtenberg, Allan J.
2005
Subject (ZB):
“
...plasma
etching
...
”
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IEK-4
1
ZB
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Name
Lichtenberg, Allan J.
Lieberman, Michael E.
1
Subject
chemical vapor deposition
1
discharge
1
ion implantation
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plasma etching
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plasma physics
1
thin film technology
Classification
FGKJ - Plasma processing, etching
1
PGA - Plasma physics
1
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