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thin film technology
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surface interaction
FJL - Physics of solid state devices
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FJL - Physics of solid state devices
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1
Book
Surfaces, interfaces, an thin
films
for microelectronics /
Irene, Eugene A.
2008
Subject (ZB):
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...thin
film
...
”
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IBN-3-4
1
Name
Irene, Eugene A.
1
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interface
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microelectronics
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semiconductor device
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semiconductor surface
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surface chemistry
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surface electronic properties
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surface electronic structure
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surface friction
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surface interaction
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FJC - Electronic properties of solids
1
FJH - Semiconductor physics
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FJL - Physics of solid state devices
TBD - Microelectronics
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