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Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies /
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Handbook of thin film deposition processes and techniques : principles, methods, equipment and applications /
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Fundamental mechanisms of low-energy-beam-modified surface growth and processing : symposium held November 29 - December 2, 1999, Boston, Massachusetts, USA [1999 MRS fall meeting /
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Materials science in microelectronics. 1. The relationships between thin film processing and structure /
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Preparation of thin films.
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George, J.
1992
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Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications /
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