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FGKJ - Plasma processing, etching
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FGKJ - Plasma processing, etching
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1
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai, Yoshinobu
2010
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CLD
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High
temperature
chemistry
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2
Book
Plasma chemistry. 3.
Veprek, S.
1980
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CLD
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High
temperature
chemistry
,
plasma
chemistry
...
”
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ZB
2
INM-5
1
Name
Kawai, Yoshinobu
1
Veprek, S.
1
Subject
biological aspect
1
cold plasma
1
environmental impact
1
flow distribution
1
gas flow
1
plasma
1
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plasma etching
1
plasma wall interaction
1
solar cell
1
thin film technology
1
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Classification
CLD - High temperature chemistry, plasma chemistry
2
FGKJ - Plasma processing, etching
PGA - Plasma physics
1
PGLJ - Plasma wall interaction, divertors
1
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