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FGKJ - Plasma processing, etching
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FGKJ - Plasma processing, etching
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1
Book
In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
Bernhardt, A. F.
1990
“
...
FGJ
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Laser
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electron
beam
processing
...
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2
Book
High energy density technologies in materials science. 2 : IGD Scientific Workshop : proceedings : Novara, 03.05.88-04.05.88.
Garbassi, F.
1990
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FGJ
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Laser
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electron
beam
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3
Book
Plasma, electron, and laser beam technology : development and use in materials processing /
Arata, Yoshiaki
1986
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FGJ
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electron
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4
Book
Radio frequency/radiation and plasma processing : industrial applications & advances /
Annett, D. M.
1985
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FGJ
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5
Book
Laser assisted deposition, etching, and doping : Los-Angeles, CA, 26.01.1984-27.01.1984 /
Allen, Susan D.
1984
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FGJ
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Laser
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electron
beam
processing
...
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Available as
Print Edition
5
Material Type
Book
5
Type of Literature
Conference Publication
3
Year of Publication
From:
To:
Location
ZB
5
Name
Allen, Susan D.
1
Annett, D. M.
1
Arata, Yoshiaki
1
Bernhardt, A. F.
1
Cheremisinoff, Paul N.
1
Farah, Oscar G.
1
more ...
Garbassi, F.
1
Ouellette, Robert P.
1
see all ...
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Subject
electron beam processing
3
laser processing
3
plasma processing
3
etching
2
materials processing
2
beam processing
1
more ...
ion beam processing
1
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Classification
FGJ - Laser and electron beam processing
5
FGKJ - Plasma processing, etching
FAF - Materials research - comprehensive works
1
FGA - Materials processing - general aspects
1
Language
English
3
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