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Betz, G.
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Betz, G.
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Sputtering by particle bombardment vol 0002: sputtering of alloys and compounds, electron and neutron sputtering, surface topography.
Behrisch, R.
1983
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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IBN-3-4
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IEK-4
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ZB
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Behrisch, R.
1
Betz, G.
Subject
sputtering
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FGKC - Vacuum deposition, MBE
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