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Puchalla, Jochen
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Puchalla, Jochen
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1
Book
Metallorganische chemische Gasphasenabscheidung (MOCVD) ferroelektrischer Dünnschichten : Herstellung und Charakterisierung /
Puchalla, Jochen
2007
“
...
FGK
-
Dünnfilmtechnologie
,
Epitaxie
...
”
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Puchalla, Jochen
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chemical vapor deposition
1
thin film
1
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FGKF - Chemical vapor deposition
1
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German
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