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Sputtering by particle bombardment vol 0002: sputtering of alloys and compounds, electron and neutron sputtering, surface topography.
Behrisch, R.
1983
“
...
FGKC
-
Vacuum
deposition
,
MBE
...
”
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IBN-3-4
1
IEK-4
1
ZB
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Behrisch, R.
1
Betz, G.
Subject
sputtering
1
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FGKC - Vacuum deposition, MBE
1
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