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Reaction and transport processes in OMCVD : selective and group III-nitride growth /
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...FGKF - Chemical vapor deposition...
2
Chemical vapor deposition of refractory metals and ceramics vol 0003 : Symposium on chemical vapor deposition of refractory metals and ceramics 0003: papers : Fall meeting of the Materials Research Society : Boston, MA, 28.11.94-30.11.94.
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