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Ambacher, Oliver
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Plasmainduzierte Abscheidung von amorphem Silicium aus Silan : vom Verständnis der chemischen Reaktionsmechanismen zur Abscheidung von hochwertigem amorphen Silicium mit grossen De...
Ambacher, Oliver
1993
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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Name
Ambacher, Oliver
Subject
amorphous silicon
1
plasma deposition
1
silane
1
Classification
FGKJ - Plasma processing, etching
1
FJEC - Amorphous semiconductors
1
Language
German
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