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Auciello, Orlando
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1
Book
Plasma-surface interactions and processing of materials : NATO Advanced Study Institute on Plasma Surface Interactions and Processing of Materials: proceedings : Alicante, 04.09.88...
Auciello, Orlando
1990
“
...
FGKJ
-
Plasma
processing
,
etching
...
”
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IEK-4
1
Name
Auciello, Orlando
Flamm, Daniel L.
1
Gras-Marti, Alberto
1
Valles-Abarca, Jose Antonia
1
Subject
plasma deposition
1
plasma etching
1
plasma processing
1
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FGKJ - Plasma processing, etching
1
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English
1
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