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1
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai, Yoshinobu
2010
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FGKJ
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processing
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etching
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2
Book
Bewertung von Plasmareinigungsverfahren als Ergänzung zur Nasschemie : Wuppertal, 18.05.94.
1994
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FGKJ
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Plasma
processing
,
etching
...
”
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Conference Publication
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2
Name
Kawai, Yoshinobu
1
Subject
plasma
biological aspect
1
cleaning
1
cold plasma
1
environmental impact
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flow distribution
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gas flow
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solar cell
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thin film technology
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FGKJ - Plasma processing, etching
2
CLD - High temperature chemistry, plasma chemistry
1
PGA - Plasma physics
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