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plasma wall interaction
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1
Book
Low temperature plasma physics : fundamental aspects and applications /
Hippler, Rainer
2001
“
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FGKJ
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Plasma
processing
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etching
...
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Select result number 2
2
Book
Plasma chemistry. 3.
Veprek, S.
1980
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FGKJ
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Plasma
processing
,
etching
...
”
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2
INM-5
1
Name
Hippler, Rainer
1
Veprek, S.
1
Subject
plasma etching
2
plasma wall interaction
plasma deposition
1
plasma diagnostics
1
plasma physics
1
plasma processing
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surface modification
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Classification
FGKJ - Plasma processing, etching
2
CLD - High temperature chemistry, plasma chemistry
1
PGLJ - Plasma wall interaction, divertors
1
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