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1
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Plasma processes for semiconductor fabrications /
Hitchon, W. N. G.
1999
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FGKJ
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Plasma
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etching
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2
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Atomic layer processing : semiconductor dry etching technology /
Lill, Thorsten
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FGKJ
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Plasma
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,
etching
...
”
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IBN-1-2
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ZB
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Hitchon, W. N. G.
1
Lill, Thorsten
1
Subject
semiconductor
Nanostructured material
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etching
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plasma etching
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plasma physics
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FGKJ - Plasma processing, etching
2
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