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FGJ - Laser and electron beam processing
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FGJ - Laser and electron beam processing
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Beam processing technologies.
Einspruch, N. G.
1989
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FGM
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Mikroelektronik
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Technologie
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Electron beam, x-ray, and ion beam techniques for submicrometer lithographies. 0005 : Santa-Clara, CA, 11.03.1986-12.03.1986 /
Blais, P. D.
1986
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Mikroelektronik
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Technologie
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Blais, P. D.
1
Einspruch, N. G.
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FGJ - Laser and electron beam processing
FGGE - Ion beam surface modification
1
FGM - Microelectronic technology
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FGME - Microlithography
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