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Einspruch, N. G.
14
Cullis, A. G.
6
Murarka, Shyam P.
3
Thompson, L. F.
3
Wolf, Stanley.
3
Ahmed, Haroon
2
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Biswas, Rajendra Narayanan
2
Blais, P. D.
2
Blewer, R. S.
2
Board, K.
2
Campbell, S. A.
2
Cleaver, John R. A.
2
Einspruch, Norman G.
2
Hartnagel, Hans Ludwig
2
Hoppe, Bernhard.
2
Horne, Douglas F.
2
Jones, Geraint A. C.
2
Levy, R. A.
2
MacGuire, G. E.
2
Nishizawa, J.
2
Rai-Choudhury, P.
2
Schroder, Dieter K.
2
Sze, S. M.
2
Yanof, A. W.
2
Ballantyne, J. M.
1
Ballantyne, J. P.
1
Barbe, D. F.
1
Barker, J. R.
1
Bate, R. T.
1
Bean, Kenneth E.
1
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microelectronics
24
VLSI technology
22
integrated circuit
21
microfabrication (for microelectronics only)
21
semiconductor device
20
microlithography
16
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semiconductor
16
VLSI (very large scale integration)
12
electronic device
9
materials characterization
9
metallization
8
photoresist
8
silicon
8
lithography
7
semiconductor processing
7
chemical vapor deposition
6
optical microlithography
6
tungsten
6
electron beam lithography
4
electron microscopy
4
sensor (technical and physical)
4
MOS device
3
MOS transistor
3
X-ray lithography
3
epitaxy
3
microtechnology
3
quantum electronics
3
semiconductor epitaxy
3
solid state device
3
thin film technology
3
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FGM - Microelectronic technology
102
FGME - Microlithography
33
FGML - Characterization of electronic materials
25
FGMH - Metallization, physics of microelectronics
21
TBF - Semiconductor devices
13
TBV - Electronic devices
11
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FHG - Electron microscopy
7
FJHE - Defects and radiation effects in semiconductors
7
FJLB - Physics of semiconductor devices
7
TBJ - Integrated circuits
7
FGK - Thin film technology, epitaxy
5
FMT - Refractory metals, refractory alloys
5
FJKC - III - V semiconductors
4
FFPE - Thin film electronic properties, semiconductor interfaces
3
TBD - Microelectronics
3
TBL - VLSI
3
FGJ - Laser and electron beam processing
2
FGKJ - Plasma processing, etching
2
FHAB - Surface and thin film characterization
2
FNK - Plastics - application, engineering aspects
2
TBA - Electronic engineering - general
2
DGAA - Computer architectures
1
FAF - Materials research - comprehensive works
1
FAQ - Materials research - institutions, research and development
1
FGCD - Crystal growth of specific substances
1
FGGB - Ion implantation, ion beam synthesis
1
FGGE - Ion beam surface modification
1
FGKF - Chemical vapor deposition
1
FGN - Nanotechnology
1
FHA - Materials characterization - general aspects
1
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