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Elastisches und plastisches Verhalten passivierter Leiterbahnen in integrierten Schaltkreisen: FEM-Rechnungen und röntgenographische Spannungsmessungen [E-Book] /
Eppler, Ingo
1998
“
...
FGMH
-
Metallization
,
physics
of
microelectronics
...
”
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ZB
1
Name
Eppler, Ingo
Subject
X-ray diffraction
1
alloy
1
integrated circuit
1
microelectronics
1
thermal stress
1
Classification
FCAB - X-ray crystallography, X-ray diffraction
1
FGMH - Metallization, physics of microelectronics
1
FMH - Thermomechanical treatment, precipitations, recrystallization, texture
1
Language
German
1
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