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1
Book
Identification of defects in semiconductors /
Stavola, Michael
1999
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2
Book
Identification of defects in semiconductors /
Stavola, Michael
1998
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FJK
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3
Book
Rapid thermal processing of semiconductors /
Borisenko, Victor E.
1997
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4
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Diamond, SiC and nitride wide bandgap semiconductors : symposium : MRS spring meeting 1994 : San-Francisco, CA, 04.04.94-08.04.94.
Carter, C. H.
1994
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5
Book
International symposium on process physics and modeling in semiconductor technology 0003: proceedings : Electrochemical Society spring meeting 1993 : Honolulu, HI, 19.05.93-21.05.9...
Srinivasan, G. R.
1993
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FJK
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5
Material Type
Book
5
Type of Literature
Conference Publication
2
Year of Publication
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Location
ZB
5
Name
Stavola, Michael
2
Borisenko, Victor E.
1
Carter, C. H.
1
Hesketh, Peter J.
1
Srinivasan, G. R.
1
Subject
defect
semiconductor
5
diffusion
2
growth
2
impurity
2
surface
2
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1
calorimeter
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computer simulation
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construction
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design
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diamond
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doping profile
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electron emission
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electronic device
1
electronic structure
1
epitaxy
1
field effect transistor
1
grain boundary
1
interface
1
ion implantation
1
modeling
1
nitride
1
optoelectronics
1
plasma processing
1
preparation
1
secondary electron emission
1
silicon
1
surface cleaning
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Classification
FJK - Specific semiconductor materials
5
FHCF - Defect characterization
2
FJHE - Defects and radiation effects in semiconductors
2
FGK - Thin film technology, epitaxy
1
FJH - Semiconductor physics
1
Language
English
1
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