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Silicon-based materials and devices. 1. Materials and processing /
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Silicon-based materials and devices. 2. Properties and devices /
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Hydrogen in semiconductors. 2 /
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Rapid thermal processing of semiconductors /
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Silicon. Supplement B5B1. Silicon nitride, mechanical and thermal properties, diffusion.
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Handbook series on semiconductor parameters. 1. Si, Ge, C Diamond, GaAs, GaP, GaSb, InAs, InP, InSb.
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Handbook on physical properties of Ge, Si, GaAs and InP.
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Dargys, A.
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Halbleiter. Teilbd C. Technologie von Si, Ge und SiC /
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