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chemical vapor deposition
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chemical vapor deposition
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1
Book
Deposition of diamond-like superhard materials /
Kulisch, Wilhelm.
1999
“
...
FNX
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Carbon
,
carbon
materials
...
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2
Book
Handbook of industrial diamonds and diamond films /
Prelas, Mark A.
1998
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FNX
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Carbon
,
carbon
materials
...
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3
Book
Low-pressure synthetic diamond : manufacturing and applications /
Dischler, Bernhard
1998
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4
Book
Diamond for electronic applications: symposium: proceedings : Boston, MA, 27.11.95-01.12.95.
Dreifus, D. L.
1996
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carbon
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5
Book
Synthetic diamond : emerging CVD science and technology /
1994
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FNX
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Carbon
,
carbon
materials
...
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Available as
Print Edition
5
Material Type
Book
5
Type of Literature
Handbook, Textbook
1
Conference Publication
1
Year of Publication
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To:
Location
ZB
4
IEK-4
1
IFF
1
Name
Dischler, Bernhard
1
Dreifus, D. L.
1
Kulisch, Wilhelm.
1
Prelas, Mark A.
1
Subject
chemical vapor deposition
diamond film
4
diamond
3
surface properties
2
thermal properties
2
characterization
1
more ...
epitaxy
1
hardness
1
mechanical properties
1
microelectronics
1
nucleation
1
optical properties
1
plasma etching
1
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Classification
FNX - Carbon, carbon materials
5
FGKF - Chemical vapor deposition
2
FGK - Thin film technology, epitaxy
1
FNPD - Hard materials, refractory compounds
1
FPUG - Special purpose coatings
1
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