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FGM - Microelectronic technology
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FGM - Microelectronic technology
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Mikroelektronik. 2. Herstellungsprozesse für integrierte Schaltungen /
Hoppe, Bernhard.
1998
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Mikroelektronik. 1. Prinzipien, Bauelemente und Werkstoffe der Siliziumtechnologie /
Hoppe, Bernhard.
1997
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Hoppe, Bernhard.
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MOS transistor
1
chemical vapor deposition
1
diffusion
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diode
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epitaxy
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etching
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ion implantation
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microelectronics
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microfabrication (for microelectronics only)
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microlithography
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semiconductor device
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silicon
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silicon device
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FGM - Microelectronic technology
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