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E-Book
Adhesion aspects in MEMS/NEMS [E-Book] /
Dugger, M. T.
2010
Subject (ZB):
“
...
Nanoelectromechanical
systems
....
”
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ZB
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Name
Dugger, M. T.
1
Kim, Seong H.
1
Mittal, K. L.
1
Subject
Adhesion.
Microelectromechanical systems.
1
Nanoelectromechanical systems.
1
Surfaces (Technology)
1
Language
English
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