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Materials and failures in MEMS and NEMS [E-Book] /
Subject (ZB): ...Nanoelectromechanical systems Design and construction....

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NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore [E-Book] /