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MEMS Materials and Processes Handbook [E-Book] /
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Silicon Carbide Microsystems for Harsh Environments [E-Book] /
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Multi-Wafer Rotating MEMS Machines [E-Book] : Turbines, Generators, and Engines /
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RF MEMS Switches and Integrated Switching Circuits [E-Book] /
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MEMS Vibratory Gyroscopes [E-Book] : Structural Approaches to Improve Robustness /
Acar, Cenk
2009
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Photonic Microsystems [E-Book] : Micro and Nanotechnology Applied to Optical Devices and Systems /
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