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FGK - Thin film technology, epitaxy
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FGK - Thin film technology, epitaxy
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1
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Interconnects in VLSI design /
Grabinski, Hartmut
2000
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Silicon VLSI technology : fundamentals, practice and modeling /
Plummer, James D.
2000
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3
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ULSI technology /
Chang, C. Y.
1996
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IBN-1-2
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Chang, C. Y.
1
Deal, Michael D.
1
Grabinski, Hartmut
1
Griffin, Peter B.
1
Plummer, James D.
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VLSI technology
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ULSI (ultra large scale integration)
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chemical vapor deposition
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connector
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epitaxy
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lithography
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FGK - Thin film technology, epitaxy
FGM - Microelectronic technology
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TBL - VLSI
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