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1
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Understanding smart sensors.
Frank, Randy.
1996
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2
Book
Integration mikromechanischer Sensoren in einer CMOS/BiCMOS Prozessumgebung.
Scheiter, Thomas.
1996
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3
Book
Microsensor and nanosensor technology : trends in sensor markets.
Meixner, H.
1995
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4
Book
Smart structures and materials 1995: smart electronics : SPIE symposium on smart materials and structures 1995: proceedings : Conference on smart electronics : San-Diego, CA, 02.03...
Varadan, Vijay. K.
1995
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4
Name
Frank, Randy.
1
Meixner, H.
1
Scheiter, Thomas.
1
Varadan, Vijay. K.
1
Subject
microtechnology
sensor (technical and physical)
3
VLSI (very large scale integration)
1
antenna
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microelectronics
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microwave equipment
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FGT - Microtechnology
4
TBW - Sensors, actuators
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FGM - Microelectronic technology
1
TBL - VLSI
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TCLB - Electric waves, microwaves, Radar
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