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Bernhardt, A. F.
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Bernhardt, A. F.
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1
Book
In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
Bernhardt, A. F.
1990
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etching
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Bernhardt, A. F.
Subject
electron beam processing
1
etching
1
ion beam processing
1
laser processing
1
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FAF - Materials research - comprehensive works
1
FGJ - Laser and electron beam processing
1
FGKJ - Plasma processing, etching
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