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Flamm, Daniel L.
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Flamm, Daniel L.
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Book
Plasma-surface interactions and processing of materials : NATO Advanced Study Institute on Plasma Surface Interactions and Processing of Materials: proceedings : Alicante, 04.09.88...
Auciello, Orlando
1990
Subject (ZB):
“
...plasma
etching
...
”
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Select result number 2
2
Book
Plasma etching : an introduction /
Manos, Dennis M.
1989
Subject (ZB):
“
...plasma
etching
...
”
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IEK-4
1
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1
Name
Flamm, Daniel L.
Auciello, Orlando
1
Gras-Marti, Alberto
1
Manos, Dennis M.
1
Valles-Abarca, Jose Antonia
1
Subject
plasma etching
2
plasma deposition
1
plasma processing
1
Classification
FGKJ - Plasma processing, etching
2
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English
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