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Semiconductors -- Etching.
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Semiconductors -- Etching.
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1
E-Book
Chemistry and lithography. 1. The chemical history of lithography [E-Book] /
Okoroanyanwu, Uzodinma
2020
Subject (ZB):
“
...Semiconductors --
Etching
....
”
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2
E-Book
Plasma Processes for Semiconductor Fabrication [E-Book] /
Hitchon, W. N. G.
1999
Subject (ZB):
“
...Plasma
etching
....
”
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3
E-Book
Introduction to microlithography : theory, materials, and processing [E-Book] /
Thompson, L. F.
1983
Subject (ZB):
“
...Plasma
etching
....
”
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3
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Book
3
Type of Literature
Conference Publication
1
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ZB
3
Name
Bowden, M. J.
1
Hitchon, W. N. G.
1
Okoroanyanwu, Uzodinma
1
Thompson, L. F.
1
Willson, C. G.
1
Subject
Semiconductors -- Etching.
Plasma etching.
2
Chemistry, Technical.
1
Lithography -- Research.
1
Lithography.
1
Microlithography.
1
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Photolithography.
1
Photoresists.
1
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English
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