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1
Book
ULSI technology /
Chang, C. Y.
1996
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2
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Cold plasma in materials fabrication : from fundamentals to applications /
Grill, Alfred.
1994
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3
Book
E.C. Photovoltaic Solar Energy Conference. 11 : proceedings of the international conference, held at Montreux, Switzerland, 12-16 October 1992 /
Guimaraes, L.
1993
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3
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Conference Publication
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IBN-1-2
1
IEK-4
1
IEK-5
1
IFF
1
ZB
1
Name
Chang, C. Y.
1
Grill, Alfred.
1
Guimaraes, L.
1
Subject
fabrication
chemical vapor deposition
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European Union
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Hall effect
1
ULSI (ultra large scale integration)
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amorphous silicon
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building
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cold plasma
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compound semiconductor
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concentration
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crystallization
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developing country
1
electrical properties
1
epitaxy
1
gallium arsenide
1
glow discharge
1
hydrogenation
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impurity
1
infrared emission spectroscopy
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interface
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lifetime
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lithography
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mass spectroscopy
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materials
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measurement
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metallization
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performance
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photoluminescence
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photovoltaic conversion
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EIP - Photovoltaics
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FGK - Thin film technology, epitaxy
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FGM - Microelectronic technology
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PGA - Plasma physics
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TBL - VLSI
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