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Entwicklung einer niederenergetischen Flüssigmetall-Rasterionensonde für die in-situ Ionenätzung im Transmissionselektronenmikroskop (TEM) /
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Subject (ZB): “...ion etching...”
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2
The physics of VLSI : Proceedings of the international conf : Physics of semiconductors : international conference. 0017 : Palo-Alto, CA, San-Francisco, CA, 01.08.1984-03.08.1984 ; 06.08.1984-10.08.1984.
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Subject (ZB): “...ion etching...”
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3
Advances in thin film technology : Sputtering and etching : Materials Research Corporation : sputtering schools. 34 and 35 : Roma, Santa-Barbara, CA, 06.84 ; 11.84.
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Weinig, S.
1984
Subject (ZB): “...ion etching...”
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