1
Low temperature plasma physics : fundamental aspects and applications /
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Plasma sources for thin film deposition and etching.
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3
E.C. Photovoltaic Solar Energy Conference. 11 : proceedings of the international conference, held at Montreux, Switzerland, 12-16 October 1992 /
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Subject (ZB): “...etching...”
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Plasma deposition, treatment, and etching of polymers /
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Plasma-surface interactions and processing of materials : NATO Advanced Study Institute on Plasma Surface Interactions and Processing of Materials: proceedings : Alicante, 04.09.88-16.09.88 /
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Plasma surface engineering vol 0001 : International conference on plasma surface engineering 0001: papers : Garmisch-Partenkirchen, 19.09.88-23.09.88.
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Subject (ZB): “...plasma etching...”
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