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1

Plasma processes for semiconductor fabrications /

Book

Plasma processes for semiconductor fabrications /

Hitchon, W. N. G.
1999

Subject (ZB): “...plasma etching...”

2

Electrochemistry of semiconductors and electronics : processes and devices /

Book

Electrochemistry of semiconductors and electronics : processes and devices /

Ludwig, Frank.
1992

Subject (ZB): “...chemical etching...”

3

Atomic layer processing : semiconductor dry etching technology /

Book

Atomic layer processing : semiconductor dry etching technology /

Lill, Thorsten

Subject (ZB): “...etching...”
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